In addition to semiconductor processing, the 13MM Pressure Sensor can also be used in other industries requiring ultra-high purity environments such as solar panel manufacturing, display manufacturing ...

Sometimes it’s nice when you can do everything you need to do with just one single port. In this vein, [Nicola Strappazzon] ...

Abstract: This paper demonstrates a piezoelectric acoustic pressure sensor that successfully combines high sensitivity with high stiffness. A concave hexagonal membrane structure was utilized to ...

Abstract: We present an experimental method for performing direct, high-speed dynamic pressure measurements of MEMS-based sensors with bandwidths exceeding 1 MHz. A focused nanosecond-pulsed laser ...